RF plasmas
Thermal plasmas: production

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RF plasmas


Thermal plasmas: production

Author : Pierre FAUCHAIS

Publication date: August 10, 2007

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2. RF plasmas

2.1 Principles

RF thermal plasmas are characterized by a total absence of electrodes, with energy transfer from the source to the plasma performed by inductive coupling. The operating principle is very similar to that of inductive metal heating . However, the "charge", i.e. the conductive plasma, has a much lower electrical conductivity than most metals (see table 1 ). This has a direct influence on the optimum frequency, reactor size and minimum power required to maintain a stable discharge.

Classical induction heating theory states that eddy currents will flow in a cylindrical tube of outer radius r n and thickness δ (skin thickness),...

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