Overview
ABSTRACT
An original method of contact localized deposition, based on the use of robotized silicon micro-feathers, has been developed in order to manufacture polymer microlens matrixes. The interest of this inexpensive manufacturing technique has been proven for the manufacture of hemispheric lenses with a sound optical quality. These results have been exploited in the domain of integrated micro-optics for the collimation of VCSEL laser diodes. This article presents this new method: the collimation of VCSEL diodes is firstly dealt with. Then, the dimensioning of micro-lenses is detailed and notably their design and sensitivity. Finally, the manufacturing process strictly speaking is explained and more specifically the deposition technique by robotized micro-feathers.
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Read the articleAUTHORS
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Véronique BARDINAL
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Emmanuelle DARAN
INTRODUCTION
The manufacture of refractive or diffractive optical microelements is currently a major challenge, particularly in the field of microsystems. The collimation of laser sources such as VCSELs (Vertical-Cavity Surface-Emitting Lasers) is particularly strategic for the production of compact optical microsystems. In this context, we present a new method for manufacturing polymer microlenses based on the use of robotized microlenses.
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Robotic micro-feathers for microlens production
Collimation of VCSEL diodes
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