2. Instruments, spectra and performance
To use electron-induced Auger spectroscopy to analyze solid surfaces, all you need is an ultra-high vacuum chamber equipped with an electron gun and analyzer (figure 7 ). Generally covering the energy range from 50 eV to 2.5 keV, the Auger electron spectrum obtained in this way guarantees an analysis depth of less than 10 nm, and lies against the continuous background of backscattered primary electrons and upstream of the secondary electron spectrum (figure 8 ). Backscattered electrons whose energy is located upstream of each Auger line can enhance the intensity of the line under consideration via an Auger backscatter coefficient, denoted r. However, this backscattering contribution does not affect...
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Instruments, spectra and performance
Quantitative analysis: relationship between intensity and concentration
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