9. Glossary – Definitions

Clusters

Ions formed from polyatomic clusters.

Dalton

Unit of atomic mass.

Parallel detection

Simultaneous detection of several secondary ions.

Sequential detection

Successive mass-by-mass detection of secondary ions.

Nano-SIMS

High spatial resolution SIMS (trade name).

Analytical profiling

Measurement of composition as a function of depth from the surface.

Dynamic SIMS

SIMS analysis under high primary current, so that detection and erosion are simultaneous.

SIMS static

SIMS analysis under very low primary current (see...