7. Three-dimensional imaging and acquisition

7.1 Technical developments

One of the most spectacular developments in microprobe mode ion analysis is the ability to continuously acquire all the information relating to the analysis performed:

• with sequential detection (magnetic deflector spectrometer), the values of the ionic intensities of the selected elements as a function of time, i.e. the depth of erosion and the position of the probe on the surface;

• in time-of-flight detection, complete mass spectra, also coupled with eroded depth and probe position on the surface.

Computerized storage of these data enables us to reconstruct the three-dimensional distribution of signal variations for selected elements, or even,...