1. Spectrometry, identification

1.1 Basic parameters

The first step in SIMS analysis is to plot the mass spectrum of the ions sputtered during bombardment of the sample, enabling identification of the elements present in the material and, under certain conditions, its constituent compounds. The aim is to achieve the best possible selectivity, taking into account problems of interference between several ions of equal mass, and the highest possible sensitivity (lowest possible detection limit) for detecting trace elements.

Some of the choices available to the experimenter are independent of the type of equipment: nature and primary current, sign of secondary ions, a certain number of parameters for spectral processing. Some data depend on the type of equipment: mass resolution, detection limits,...