Quantitative analysis
Secondary ion mass spectrometry: SIMS and ToF-SIMS Analytical procedures and performances
Article REF: P2619 V2
Quantitative analysis
Secondary ion mass spectrometry: SIMS and ToF-SIMS Analytical procedures and performances

Authors : Evelyne DARQUE-CERETTI, Marc AUCOUTURIER, Patrice LEHUÉDÉ

Publication date: March 10, 2015 | Lire en français

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2. Quantitative analysis

Obtaining true concentrations in a material is one of the method's weak points, due to the complexity and variability of sputtering and ionization processes under particle bombardment. However, a number of procedures are available for quantitative analysis. The problems of selectivity and sensitivity obviously arise in the same terms as before, and the experimental procedures for optimizing measurements remain the same.

2.1 General expressions

The phenomenological expression for the ionic intensity (number of particles per unit time) collected for a given ionic species A ± is written :

I( A±)=F1A±(collecte )∘F2A±(ionisation) ∘F3A (pulvérisation) 

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