2. Comparison sequence
The comparison was led by LNE as part of the Club nanoMétrologie ("Instrumentation" technical group) and took place in 2014 and 2015.
As this comparison involved a large number of participants (26 in all), it was decided to circulate two batches of samples, each comprising a P900H60 network and a VLSI standard. A back-up batch was also provided in case of package loss or network damage during the comparison.
Figure 4 explains how the comparison is organized in three stages:
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Protocols
Bibliography
- (1) - SEPPÄ (J.), KORPELAINEN (V.), BERGSTRAND (S.), KARLSSON (H.), LILLEPEA (L.), LASSILA (A.) - Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe. - Meas. Sci. Technol., vol. 25, n° 4, DOI: 10.1088/0957-0233/25/4/044013 (2014).
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Standards and norms
- Geometric product specification (GPS) – Surface finish: profile method; standards – Part 1: materialized measurements. ISO - ISO 5436-1 - 2000
- Chemical analysis of surfaces – Scanning probe microscopy – Determination of geometric quantities using scanning probe microscopes: calibration of measuring systems. ISO - ISO 11952 - 2019
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