Results
Comparison of grating size measurements for AFM and SEM calibration
Article REF: R6741 V1
Results
Comparison of grating size measurements for AFM and SEM calibration

Authors : Alexandra DELVALLÉE, Sébastien DUCOURTIEUX

Publication date: December 10, 2022 | Lire en français

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4. Results

4.1 General condition of networks before and after traffic

The quality of the networks used for the comparison is illustrated in figure 10 .

.Array quality (VLSI A standard on the...
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