2. Principles of microsystems used in electrical metrology
2.1 Microsystems components
2.1.1 Manufacturing technologies
Silicon micromachining is traditionally divided into two categories: surface micromachining and bulk micromachining . The silicon-on-insulator (SOI) process lies between the...
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Principles of microsystems used in electrical metrology
DC and low-frequency applications
Article included in this offer
"Electronic measurements and tests"
(
80 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
References
Books and magazines
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
