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Research and innovation | REF: RE263 V1

Input of In situ characterisation in atomic layer deposition (ALD) processes.

Authors: Jean-Luc DESCHANVRES, Carmen JIMENEZ

Publication date: October 10, 2016 | Lire en français

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    5. Acronyms

    ALD: Atomic Layer Deposition – Atomic Layer Deposition by alternating flow

    ANR: French National Research Agency

    DMZ: Dimethylzinc, Zn(CH 3 ) 2

    DEZ: Diethylzinc, Zn(C 2 H 5 ) 2

    DFT: Density Functional Theory –

    DMA: Dimethylamine

    EMA: effective-medium-approximation – effective-medium-approximation

    EXAFS: Extented X-ray Absorption Fine Structure – analysis of fine X-ray absorption oscillations over an extended range

    FTIR: Fourier Transform Infrared spectroscopy.

    GISAXS: Grazing...

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