Permeation Theory and Measurement Techniques
Environmental barriers by ALD

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RE261 V2 Article

Permeation Theory and Measurement Techniques
Environmental barriers by ALD

Authors : Frédéric MERCIER, Stéphane CROS, Aubin PARMENTIER, Hugo PATUREAU

Publication date: September 10, 2026 | Lire en français

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2. Permeation Theory and Measurement Techniques

2.1 Mechanism of gas permeation in homogeneous monolayers

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2.1.1 Theory

The transport of a gaseous species within a homogeneous solid thin film can be described as a three-step process. This physical mechanism, presented in detail in [AM 3 160]...

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