Références bibliographiques
Nanoimpression et nanomoulage

RAI-CHOUDHURY (P.) (Ed.)Handbook of Microlithography, Microfabrication and Microsystems, vol 1 & 2, SPEI Press (1997).KRAUSS (P.R.)CHOU (S.Y.)J. Vac. Sci. Technol. B 13, p. 2850 (1995).CHOU (S.Y.)KRAUSS (P.R.)RENSTROM (P.J.)Science. 85, p. 272 (1996).International Technology Roadmap for Semiconductors (ITRS), Edition 2003.BAO (L.R.)CHENG (X.)HUANG (X.D.)GUO (L.J.)PANG (S.W.)YEE (A.F.)J. Vac. Sci. Technol. B 20, p. 2881 (2002).HAISMA (J.)VERHEIJEN (M.)VAN DEAN HEUVEL (K.)VAN DEN BERG (J.)J. Vac. Sci. Technol. B 14, p. 4124 (1996).COLBURN (M.)GROT (A.)AMISTOSO (M.)CHOI (B.J.)BAILEY (T.)EKERDT (J.G.)SREENIVASAN (S. V.)HOLLENHORST (J.)WILLSON (C.G.)SPIE Proc. 3676, p. 379 (1999).CHEN (Y.)CARCENAC (F.)ECOFFET (C.)LOUGNOT (D.J.)LAUNOIS (H.)Microelectron. Eng. 46, p. 69 (1999).BENDER (M.)OTTO (M.)HADAM (B.)SPANGENBERG (B.)Microelectron. Eng. 53,...