Overview
ABSTRACT
This article addresses the topic of monolithic microwave integrated circuits (MMICs), a technology that has evolved uninterruptedly since 1975, and finds use in many applications. We describe their performance, technology and design tools. More specifically, the process flow and steps for III-V and silicon technologies are detailed.
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Read the articleAUTHORS
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Gilles DAMBRINE : Professor at the University of Lille, - Institut d'Électronique de Microélectronique et de Nanotechnologies, IEMN, France
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Didier BELOT : Engineer (PhD, HDR), STMICROELECTRONICS, Crolles, France
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Pascal CHEVALIER : Engineer (PhD), STMICROELECTRONICS, Crolles, France
INTRODUCTION
The first realization of Monolithic Microwave Integrated Circuits (MMICs) in 1975 opened up a new field that has continued to evolve ever since. While the development of these circuits was initially driven by the military sector, most applications are now civilian: either for the general public, such as terrestrial radio communications, or high-performance applications such as microwave repeaters on board satellites. MMICs were originally developed exclusively for III-V technologies, but have since been extended to silicon technologies. In the first part, we present the state of the art and the frequency potential of MMICs, the main technological channels and their fields of application. The main steps and tools for designing MMICs are described. The second part is devoted to a generic description of MMIC technology, followed by the steps specific to III-V and silicon technologies.
This study of microwave monolithic integrated circuits is complemented by several other articles:
A glossary and list of acronyms are provided at the end of the article.
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KEYWORDS
telecommunication | space and defense | high frequence microelectronics
MMIC :Advanced and technology
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