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Article | REF: P886 V1

Electron probe X-ray microanalysis - Applications and developments

Author: Jacky RUSTE

Publication date: June 10, 2009 | Lire en français

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    Overview

    ABSTRACT

    The electron probe X-ray microanalysis consists in analyzing the characteristic spectrum of X-rays generated in a target by a finely focused electron beam. This article details the main applications of this analysis technique. The purely qualitative chemical analysis, with the acquisition of an X-ray spectrum, allows for an easy detection of major elements, which is not the case for those in low concentrations. The X-ray cartography provides the repartition of the analyzed element. The electron probe X-ray microanalysis takes a step further; the quantification is made possible due to the electron diffusion inside of the target, ionization, and the photoelectric absorption of the generated X ray.

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    AUTHOR

    • Jacky RUSTE: INSA engineer, doctor-engineer, senior engineer - EDF Research and Development, Centre des Renardières - Materials and Component Mechanics Department (Moret-sur-Loing)

     INTRODUCTION

    This article follows on from [P 885v2] , which looked at the theoretical and instrumental aspects of X-ray microanalysis using electron probes.

    Three main applications can be distinguished: purely qualitative chemical analysis, X-ray mapping and quantitative analysis.

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