7. Microanalysis in STEM

In X-ray microanalysis on solid samples, spatial resolution is typically in the micrometer range, both laterally and in depth (figure 21 a). If we want to analyze much smaller volumes, we have to turn to transmission electron microscopy and thin samples. Spatial resolution is then driven by the probe diameter d ₀ , slightly enhanced by the (moderate) effects of electron scattering (figure 21 b) which can be estimated by the following relationship: