4. Examples of non-vibrating accelerometers
Note: numerical values relating to the accuracy of accelerometric sensors should be considered as orders of magnitude, as their actual performance depends on operating conditions.
4.1 SFIM ACSIL accelerometer
The sensor consists of a micromachined silicon pendulum positioned in a sealed enclosure between two electrodes. The force that sets the pendulum to zero is generated by an electric field emitted by the electrodes.
Dimensions mm 3
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Examples of non-vibrating accelerometers
Vibrating accelerometers
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