Capacity measurement
Measurement techniques for electrical quantities adapted to nanocircuits

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R1084 V1 Article

Capacity measurement


Measurement techniques for electrical quantities adapted to nanocircuits

Authors : Brice GAUTIER, Pascal CHRÉTIEN, Khalifa AGUIR, Frédéric HOUZÉ, Olivier SCHNEEGANS, Johannes HOFFMANN, Nicolas CHEVALIER, Łukasz BOROWIK, Dominique DERESMES, Pierre GOURNAY, Philippe MAILLOT, François PIQUEMAL

Publication date: December 10, 2016 | Lire en français

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2. Capacity measurement

2.1 Introduction

Capacitance measurement is used in many fields relating to sensors (pressure, displacement...), but also for many applications linked to memories and other electronic devices. These sectors of activity are also suffering the consequences of extreme miniaturization, driven by the need to develop the least invasive sensors possible for bio-medical applications (in vivo measurements, monitoring, etc.). Measurement techniques must therefore once again evolve towards largely sub-micron spatial resolutions.

However, electrical capacitance is by definition an extensive quantity, proportional to the surface area of the opposing capacitor plates. For this reason, capacitance measurements involving an AFM tip with a very small surface area have to be...

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