7. Microanalysis in STEM
In X-ray microanalysis on solid samples, spatial resolution is typically in the micrometer range, both laterally and in depth (figure 21 a). If we want to analyze much smaller volumes, we have to turn to transmission electron microscopy and thin samples. Spatial resolution is then driven by the probe diameter d 0 , slightly enhanced by the (moderate) effects of electron scattering (figure 21 b) which can be estimated by the following relationship:
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Microanalysis in STEM
Applications, a few examples
Article included in this offer
"Analysis and Characterization"
(
271 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
Also in our database
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
