9. Outlook: sub-micron analysis
The main limitation of microanalysis on massive targets lies in its spatial resolution. While in SIMS it can reach 25 nm (NanoSIMS) and in Auger only a few nanometers, it typically remains in the micrometer range.
Two factors limit spatial resolution: probe diameter d
0
and, above all, electron scattering (cf.
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Outlook: sub-micron analysis
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