1. Microsensors, microtechnologies
This category of sensors, where the focus is more on exploiting new production tools than new principles, closely combines the manufacturing processes of microelectronics with those of micromechanics. This development, underpinned by the need to produce small, reliable integrated sensors at low cost, began with the first integrated strain gage sensors (see
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Microsensors, microtechnologies
Force balance sensors and transmitters
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"Physical measurements"
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